Etching system and etching method

Details Etching system and etching method Etching system and etching method

2005-07-12

2005-07-12

Hassanzadeh, Parviz (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With measuring, sensing, detection or process control means

C156S345250, C438S005000, C438S009000

Reexamination Certificate

active

06916396

ABSTRACT:
An etching system for subjecting a single film to be etched to etching involves a plurality of etching steps in which respective different recipes are applied. The etching system employs recipe generating means which fixes the recipe to be applied to the final etching step, affecting an underlying film making contact with the film to be etched, of the etching steps, to a preset recipe, and which generates a recipe to be applied to the residual etching step on the basis of the results of processing. Etching processing is conducted according to the recipes generated by the recipe generating means.

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patent: 5971591 (1999-10-01), Vona et al.
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patent: 6440760 (2002-08-01), Cho et al.
patent: 9-326382 (1997-12-01), None

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