Compositions – Etching or brightening compositions
Reexamination Certificate
2003-12-11
2008-08-26
Norton, Nadine G. (Department: 1792)
Compositions
Etching or brightening compositions
C438S689000, C216S096000, C216S097000
Reexamination Certificate
active
07416681
ABSTRACT:
An etching solution for a multiple layer of copper and molybdenum includes: about 5% to about 30% by weight of a hydrogen peroxide; about 0.5% to about 5% by weight of an organic acid; about 0.2% to about 5% by weight of a phosphate; about 0.2% to about 5% by weight of a first additive having nitrogen; about 0.2% to about 5% by weight of a second additive having nitrogen; about 0.01% to about 1.0% by weight of a fluoric compound; and de-ionized water making a total amount of the etching solution 100% by weight.
REFERENCES:
patent: 2001/0008828 (2001-07-01), Uchikura et al.
Chae Gee-Sung
Choi Yong-Suk
Hwang Yong-Sup
Jo Gyoo-Chul
Kim Seong-Su
Dong-Woo Fine Chem Co., Ltd.
George Patricia A.
LG Display Co. Ltd.
McKenna Long & Aldridge LLP
Norton Nadine G.
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