Etching process which protects metal

Details Etching process which protects metal Etching process which protects metal

1998-06-10

2000-02-22

Kunemund, Robert

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

438753, 438754, 156628, H01L 2100

Patent

active

060277904

ABSTRACT:
The present invention is directed to a novel etching process for a semiconductor material which inhibits corrosion of metal comprised of pretreating the material, preferably with a surfactant, and then exposing the material to a mixture comprising a buffered oxide etch.

REFERENCES:
patent: 4040897 (1977-08-01), Blish, II et al.
patent: 4554182 (1985-11-01), Bupp et al.
patent: 4883775 (1989-11-01), Kobayashi
patent: 5135605 (1992-08-01), Blonder et al.
patent: 5431777 (1995-07-01), Austin et al.
patent: 5593538 (1997-01-01), Davison et al.

Affiliated with

Also associated with

Rating

Etching process which protects metal does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Etching process which protects metal, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Etching process which protects metal will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-518606