Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-04-11
2006-04-11
Mack, Ricky L. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S291000, C359S295000, C359S298000
Reexamination Certificate
active
07027200
ABSTRACT:
The present invention discloses a method and apparatus for removing the sacrificial materials in fabrications of microstructures using a vapor phase etchant recipe having a spontaneous vapor phase chemical etchant. The vapor phase etchant recipe has a mean-free-path corresponding to the minimum thickness of the sacrificial layers between the structural layers of the microstructure. This method is of particular importance in removing the sacrificial layers underneath the structural layers of the microstructure.
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Huibers Andrew G.
Patel Satyadev R.
Schaadt Gregory P.
Shi Hongqin
Mack Ricky L.
Muir Gregory R.
Reflectivity, INC
Thomas Brandi
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