Etching method for fabricating high quality optical fiber probe

Details Etching method for fabricating high quality optical fiber probe Etching method for fabricating high quality optical fiber probe

2005-06-14

2005-06-14

Ahmed, Shamim (Department: 1765)

Etching a substrate: processes

Nongaseous phase etching of substrate

Etching inorganic substrate

C216S011000, C216S083000, C156S345110

Reexamination Certificate

active

06905627

ABSTRACT:
Techniques for chemically etching a fiber tip to form a smooth fiber probe. One implementation applies a coating layer around a bare fiber to expose only an end facet of the bare fiber and then the exposed end facet is immersed into an etching liquid to be away from a meniscus interface between the etching liquid and the fiber to etch the fiber from the end facet.

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Lambelet et al., “Chemically etched fiber tips for near-field optical microscopy: a process for smoother tips,” Applied Optics, vol. 37, No. 31, pp. 7289-7292, Nov. 1, 1998.
Zeisel et al., “Pulsed laser-induced desorption and optical imaging on a nanometer scale with scanning near-field microscopy using chemically etched fiber tips,” Appl. Phys. Lett., vol. 68, No. 18, pp. 2491-2492, Apr. 29, 1996.

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