Compositions – Etching or brightening compositions
Patent
1992-10-06
1995-02-07
Breneman, R. Bruce
Compositions
Etching or brightening compositions
252 792, 252 793, 252 794, 156664, 156665, 156637, H01L 2100
Patent
active
053873610
ABSTRACT:
Aluminum is etched with an etching liquid comprising an aqueous solution containing a hydrofluoride of an aliphatic primary, secondary or tertiary amine of a formula:
REFERENCES:
patent: 4459216 (1984-07-01), Nakazato
patent: 4886920 (1989-12-01), Cantrell
Ishitobi Hideaki
Ito Hiroya
Kohara Ichiro
Kondo Kiyoshi
Takaishi Masakatu
Breneman R. Bruce
Goudreau George
Oogi Chemical Industry Co., Ltd.
Sharp Kabushiki Kaisha
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