Etching liquid for aluminium, method of etching aluminium and et

Compositions – Etching or brightening compositions

Patent

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Details

252 792, 252 793, 252 794, 156664, 156665, 156637, H01L 2100

Patent

active

053873610

ABSTRACT:
Aluminum is etched with an etching liquid comprising an aqueous solution containing a hydrofluoride of an aliphatic primary, secondary or tertiary amine of a formula:

REFERENCES:
patent: 4459216 (1984-07-01), Nakazato
patent: 4886920 (1989-12-01), Cantrell

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