Etching apparatus with plural nozzle arrangements

Details Etching apparatus with plural nozzle arrangements Etching apparatus with plural nozzle arrangements

1974-04-19

1976-04-27

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156 8, 156 18, C23F 102

Patent

active

039532763

ABSTRACT:
An apparatus for re-etching the apertures of different size shadow masks has a plurality of sets of etchant supply arms individually having an effective length related to a particular mask size, each set being connected to an assigned one of a corresponding plurality of etchant supply means. Each of the supply means is individually selected by a selecting means for connection to a source of etchant material suitable for attacking the masks.

REFERENCES:
patent: 1559727 (1925-11-01), Merseles et al.
patent: 2648931 (1972-03-01), Jacobs
patent: 2808842 (1957-10-01), Pollock et al.
patent: 2918927 (1959-12-01), Clearman
patent: 3285779 (1966-11-01), Dunham
patent: 3370869 (1968-02-01), Dutcher
patent: 3666579 (1972-05-01), Dietch
patent: 3702277 (1972-11-01), Lerner
patent: 3702277 (1972-11-01), Lerner

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