Etching apparatus and etching system using the method thereof

Details Etching apparatus and etching system using the method thereof Etching apparatus and etching system using the method thereof

1999-12-28

2000-11-21

Knode, Marian C.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118723E, 118712, 118713, C23F 102

Patent

active

061497614

ABSTRACT:
A method for detecting an etching endpoint and a plasma etching apparatus and a plasma etching system using such a device are disclosed, in which time series data of a signal corresponding to the amount of light of the plasma light generated during the plasma etching process are arithmetically processed, so that the change of light amount is corrected and an etching endpoint is detected from the time series data after the correction.

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