Etching apparatus

Details Etching apparatus Etching apparatus

2006-01-09

2009-02-24

Hassanzadeh, Parviz (Department: 1792)

Etching a substrate: processes

Forming or treating article containing a liquid crystal...

Reexamination Certificate

active

07494595

ABSTRACT:
Disclosed is an etching apparatus enabling to increase productivity of etching glass substrates. The present invention includes an etching bath having an etchant, a plurality of sensors inside the etching bath detecting a level of the etchant, and a deionized water tube spraying a deionized water to the sensors.

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English Translation of JP 61-247034 to Karita, translated by the McElroy Translation Company; Jul. 2005.

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