Etching apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant

Reexamination Certificate

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Details

C134S113000

Reexamination Certificate

active

07014732

ABSTRACT:
Disclosed is an etching apparatus enabling to increase productivity of etching glass substrates. The present invention includes an etching bath having an etchant, a plurality of sensors inside the etching bath detecting a level of the etchant, and a deionized water tube spraying a deionized water to the sensors.

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English Translation of JP 61-247034 to Karita, translated by the McElroy Translation Company; Jul., 2005.

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