Metal treatment – Compositions
Patent
1991-04-01
1993-06-22
Rosenberg, Peter D.
Metal treatment
Compositions
148 23, 156903, B23K 3534
Patent
active
052213668
ABSTRACT:
This invention is a residue-free vapor-phase process for etching metallic layers during the manufacturing of integrated circuits. The process comprises contacting a portion of the metallic surface to be etched with an effective amount of an etching agent comprising a .beta.-diketone or .beta.-ketoimine dispersed in an atmosphere capable of oxidizing the metal to be removed at a temperature sufficient to form a volatile metal-ligand complex. The volatile metal-ligand complex is sublimed from the surface thereby etching successive layers of the metal.
REFERENCES:
patent: 2801194 (1957-07-01), Doerr
patent: 2801195 (1957-07-01), Doerr
patent: 2801196 (1957-06-01), Doerr
patent: 3301688 (1967-01-01), Simpelaar
patent: 3985586 (1976-10-01), Choby
patent: 3985587 (1976-10-01), Choby
patent: 4059218 (1977-11-01), Choby
patent: 4060191 (1977-11-01), Choby
patent: 4216035 (1980-08-01), Bakos
patent: 5116432 (1992-05-01), Kerner
Amendment under 37 C.F.R. 1.111 & Response to Restriction Requirement under 37 C.F.R. 1.143 re: 07/502,209.
First Office Action dated Jun. 22, 1990 re: 07/502,209.
Bohling David A.
Ivankovits John C.
Norman John A. T.
Roberts David A.
Air Products and Chemicals Inc.
Gourley Keith D.
Marsh William F.
Rosenberg Peter D.
Simmons James C.
LandOfFree
Etching agents comprising .beta.-diketone and .beta.-ketoimine l does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Etching agents comprising .beta.-diketone and .beta.-ketoimine l, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Etching agents comprising .beta.-diketone and .beta.-ketoimine l will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1438955