Etching a diamond body with a molten or partially molten metal

Details Etching a diamond body with a molten or partially molten metal Etching a diamond body with a molten or partially molten metal

1992-07-02

1996-01-23

Goudreau, George

Etching a substrate: processes

Adhesive or autogenous bonding of two or more...

156 60, 216 96, 216 46, H01L 2100

Patent

active

054862639

ABSTRACT:
A diamond body, such as a CVD diamond film, is etched by immersion of the body in a molten or partially molten metal, such as the rare earth metal La or Ce. While the body is being etched, various portions of a major surface of the body can be protected for various time durations by masks against the etching--whereby, after dicing the body, the resulting dies can be used as submounts for lasers with feedback.

REFERENCES:
Graebner, J. E. et al., Appl. Phys. Lett., "Unusually High Thermal Conductivity in Diamond Films," vol. 60, pp. 1576-1578 (Mar. 30, 1992).
Jin, S. et al., "Massive Thinning of Diamond Films by a Diffusion Process," Appl. Phys. Lett., vol. 60, pp. 1948-1950 (Apr. 20, 1992).
Application Ser. No. 07/822,470, filed Jan. 17, 1992, J. E. Graebner Jan. 28, 1952.
"Classification of Phase Diagrams of Metal--Carbon Systems In Relation To Diamond Synthesis"; Butylenko et al.; 1977; Sint. Al mazy, (4), 19-13; abstract only.
"Importance of The Experimental Growth And Dissolution of Diamond Crystals In Metal--Carbon Systems For Understanding Some Aspects of Natural Diamond Origin"; Eksp. Issled. Mineroloobrazov. Sukkikh Okisnykh Siliket Sist.; Litrin et al.; 1972; abstract only.
"Weettability and Contact Interaction of Metallic Melts With Diamond And Cubic Baron Nitride"; Sint. Almazy Prom-Sti; Doke Nauchn. Sookstch. Sov. Zarub. Uch. Spets.; Mezhduner, Konf.; meeting Date 1971; 32-6; 1971; abstract only.
"Polishing of CVD Diamond Film"; 1991; Tzeng et al.; Applications of Diamond Films and Related Materials, pp. 241-248.
"Adhession Interaction And Contact Eutectic Melting of Diamond With Metals"; Sin Almazag, 3(6), 1971, abstract only.
"Development and Performance of A Diamond Film Polishing Apparatus With Hot Metals"; S.P.I.E., vol. 1325; Diamond Optics; 1990; Yoskikawa; pp. 210-219.
"Diamond Growth Rates"; 1971; J. Phys. Chem., 75(12); Wentorf; pp. 1833-1837.

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