Etched-facet semiconductor optical component with integrated...

Optical waveguides – Integrated optical circuit

Reexamination Certificate

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Details

C385S015000, C385S031000, C385S129000, C438S031000

Reexamination Certificate

active

07817882

ABSTRACT:
An optical apparatus comprises: a semiconductor substrate; a semiconductor optical device integrally formed on the substrate and having an off-normal device end face; and a low-index planar optical waveguide integrally formed on the semiconductor substrate at the device end face. The device and waveguide are non-collinear, and the waveguide is end-coupled at its proximal end to the optical device by refraction at the device end face. The apparatus further includes a reflective coating between the waveguide and substrate, an etched end face curved in the horizontal dimension, or an etched end face with a lower portion that protrudes beneath a proximal portion of the waveguide.

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