Etchant rejuvenation control system

Details Etchant rejuvenation control system Etchant rejuvenation control system

1976-04-26

1977-08-16

Van Horn, Charles E.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

137391, 137426, 156627, 156642, C23F 102

Patent

active

040424448

ABSTRACT:
The ORP of the initial etchant solution is utilized as a set point. A predetermined change in the ORP triggers the removal of a predetermined volume of spent etchant. Fresh etchant addition steps and oxidation of the working etchant (addition of chlorine) are sequenced by the initial fixed volume withdrawal. The oxidation and fresh etchant addition steps proceed to conclusion independently. The oxidation step is terminated by a return of the ORP to the initial level.

REFERENCES:
patent: 2885118 (1959-05-01), Remke
patent: 2959055 (1960-11-01), True
patent: 3136455 (1964-06-01), Coes
patent: 3186598 (1965-06-01), Jonsson
patent: 3298231 (1967-01-01), Zukley
patent: 3592715 (1971-07-01), Lindstrom
patent: 3843504 (1974-10-01), Nayder
patent: 3933544 (1976-01-01), Haas
patent: 3964956 (1976-06-01), Snyder

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