Etch stop layer for silicon (Si) via etch in...

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With contact or lead

Reexamination Certificate

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C257S686000, C257S773000

Reexamination Certificate

active

07148565

ABSTRACT:
A method of forming a silicon (Si) via in vertically stacked wafers is provided with a contact plug extending from selected metallic lines of a top wafer and an etch stop layer formed prior to the contact plug. Such a method comprises selectively etching through the silicon (Si) of the top wafer until stopped by the etch stop layer to form the Si via; depositing an oxide layer to insulate a sidewall of the Si via; forming a barrier layer on the oxide layer and on the bottom of the Si via; and depositing a conduction metal into the Si via to provide electrical connection between active IC devices located on vertically stacked wafers and an external interconnect.

REFERENCES:
patent: 4803450 (1989-02-01), Burgess et al.
patent: 5753536 (1998-05-01), Sugiyama et al.
patent: 5998292 (1999-12-01), Black et al.
patent: 6037668 (2000-03-01), Cave et al.
patent: 6265779 (2001-07-01), Grill et al.
patent: 6448174 (2002-09-01), Ramm
patent: 6522002 (2003-02-01), Shinkawata
Ultra Thin Electronics for Space Applications. 2001 Electronic Components and Technology Conference, 2001 IEEE.
“Copper Wafer Bonding”; A. Fan, A. Rahman, and R. Reif; Electrochemical and Solid-State Letters, 2 (10) 534-538 (1999).
“Face to Face Wafer Bonding for 3D Chip Stack Fabrication to Shorten Wire Lengths”, Jun. 27-29, 2000 VMIC Conference 2000 IMIC—200/00/0090(c).

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