Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With contact or lead
Reexamination Certificate
2006-12-12
2006-12-12
Vu, Hung (Department: 2811)
Active solid-state devices (e.g., transistors, solid-state diode
Housing or package
With contact or lead
C257S686000, C257S773000
Reexamination Certificate
active
07148565
ABSTRACT:
A method of forming a silicon (Si) via in vertically stacked wafers is provided with a contact plug extending from selected metallic lines of a top wafer and an etch stop layer formed prior to the contact plug. Such a method comprises selectively etching through the silicon (Si) of the top wafer until stopped by the etch stop layer to form the Si via; depositing an oxide layer to insulate a sidewall of the Si via; forming a barrier layer on the oxide layer and on the bottom of the Si via; and depositing a conduction metal into the Si via to provide electrical connection between active IC devices located on vertically stacked wafers and an external interconnect.
REFERENCES:
patent: 4803450 (1989-02-01), Burgess et al.
patent: 5753536 (1998-05-01), Sugiyama et al.
patent: 5998292 (1999-12-01), Black et al.
patent: 6037668 (2000-03-01), Cave et al.
patent: 6265779 (2001-07-01), Grill et al.
patent: 6448174 (2002-09-01), Ramm
patent: 6522002 (2003-02-01), Shinkawata
Ultra Thin Electronics for Space Applications. 2001 Electronic Components and Technology Conference, 2001 IEEE.
“Copper Wafer Bonding”; A. Fan, A. Rahman, and R. Reif; Electrochemical and Solid-State Letters, 2 (10) 534-538 (1999).
“Face to Face Wafer Bonding for 3D Chip Stack Fabrication to Shorten Wire Lengths”, Jun. 27-29, 2000 VMIC Conference 2000 IMIC—200/00/0090(c).
Kim Sarah E.
Letson Tom
List R. Scott
Blakely , Sokoloff, Taylor & Zafman LLP
Intel Corporation
Vu Hung
LandOfFree
Etch stop layer for silicon (Si) via etch in... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Etch stop layer for silicon (Si) via etch in..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Etch stop layer for silicon (Si) via etch in... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3696623