Etalon devices employing multiple materials

Details Etalon devices employing multiple materials Etalon devices employing multiple materials

2005-01-18

2005-01-18

Assaf, Fayez (Department: 2872)

Optical: systems and elements

Light interference

C359S581000, C359S578000, C359S588000, C359S587000, C359S260000, C359S247000

Reexamination Certificate

active

06844975

ABSTRACT:
The invention provides a substantially athermal etalon. In one embodiment, the multi-cavity etalon includes at least one free-standing multi-layer thin film and is rendered thermally stable through the use of the free-standing multi-layer film and spacers having predetermined thermal expansion coefficients. In another embodiment, the multi-cavity etalon is rendered thermally stable through the use of mixed spacers.

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