Estimation method and apparatus for semiconductor light emitting

Details Estimation method and apparatus for semiconductor light emitting Estimation method and apparatus for semiconductor light emitting

1994-08-04

1996-07-30

Fields, Carolyn E.

Radiant energy

Luminophor irradiation

2504591, G01N 2164, G01R 3126

Patent

active

055414168

ABSTRACT:
A luminous efficiency is estimated by obtaining a life time a of few carriers controlling the luminous efficiency. An estimation method inadiates pulsed laser light for exciting carriers in a light emitting layer by a co-focal point optical system, at a specified position of the light emitting layer of a light emitting element formed on a surface of a wafer. A life time is obtained by detecting the fluorescent light emitted from the specified position in the light emitting layer corresponding to an irradiation of the pulsed laser light and by observing a change of the fluorescent light with lapse of a time. A luminous efficiency is estimated at the specified position in the light emitting layer from the life time on the basis of a correlation of a life time and a luminous efficiency previously obtained, thereby enabling an estimation of the light emitting element at a wafer stage without destroying the wafer and without contact therewith.

REFERENCES:
patent: 5227638 (1993-07-01), Mizushima et al.
patent: 5381016 (1995-01-01), Moriya
Black et al., "Scanned-Laser Microscope For Photoluminescence Studies", Applied Optics, vol. 11, No. 7, Jul. 1972, pp. 1553-1562.
Upton et al., "Fluorescence Quantum Yield Determination by Pulsed Source Single Photon Counting", Analytical Chemistry, vol. 51, No. 12, Oct. 1979, pp. 1941-1945.

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