Ester compounds and their preparation, polymers, resist...

Details Ester compounds and their preparation, polymers, resist... Ester compounds and their preparation, polymers, resist...

2011-03-08

2011-03-08

Chu, John S (Department: 1722)

Organic compounds -- part of the class 532-570 series

Organic compounds

Heterocyclic carbon compounds containing a hetero ring...

C549S499000, C560S220000, C430S270100, C430S910000

Reexamination Certificate

active

07902385

ABSTRACT:
Novel ester compounds having formulae (1) to (4) wherein A1is a polymerizable functional group having a carbon-carbon double bond, A2is oxygen, methylene or ethylene, R1is a monovalent hydrocarbon group, R2is H or a monovalent hydrocarbon group, any pair of R1and/or R2may form an aliphatic hydrocarbon ring, R3is a monovalent hydrocarbon group, and n is 0 to 6 are polymerizable into polymers. Resist compositions comprising the polymers as a base resin are thermally stable and sensitive to high-energy radiation, have excellent sensitivity and resolution, and lend themselves to micropatterning with electron beam or deep-UV.

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