ESD sensor and method of use

Details ESD sensor and method of use ESD sensor and method of use

1996-04-24

1998-08-18

Brock, Michael

Electricity: measuring and testing

A material property using electrostatic phenomenon

For flaw detection

324 72, 340650, G01N 2760, G01R 3126

Patent

active

057962561

ABSTRACT:
An ESD sensor includes a plurality of layers of dielectric material positioned on a substrate, each having a different thickness, a first contact positioned adjacent each of the plurality of layers and a plurality of second contacts, one each positioned on each layer of the plurality of layers of dielectric material. Each different thickness of each individual layer of dielectric material is formed to provide a specific voltage at which an electrical short will occur between the first and second contacts when an ESD appears thereacross, so that the sensor provides an indication of a range of voltages.

REFERENCES:
patent: 4823088 (1989-04-01), Fukuda
patent: 5359319 (1994-10-01), Campbell et al.
patent: 5376879 (1994-12-01), Schrimpf et al.

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