Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Responsive to non-optical – non-electrical signal
Patent
1994-01-19
1995-05-09
Chaudhuri, Olik
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Responsive to non-optical, non-electrical signal
257322, 257355, 257414, H01L 2966, H01L 2996
Patent
active
054142849
ABSTRACT:
Methods, apparatus and chip fabrication techniques are described which provide electrostatic discharge (ESD) protection to ion-sensitive field effect transistor (ISFET) based devices used to selectively measure ions in a liquid. According to one aspect of the invention, an ESD protection circuit, made up of conventional protective elements, is integrated onto the same silicon chip on which the ISFET is formed, along with an interface that is in contact with the liquid being measured and which does not open up paths for D.C. leakage currents between the ISFET and the liquid. According to a preferred embodiment of the invention, a capacitor structure is used as the interface between the protection circuit and the liquid sample. Further aspects of the invention are directed to methods per se for providing ESD protection for ISFET sensors utilizing the interface means (e.g, capacitor structure) referred to hereinabove, and processes for fabricating the novel interface on a silicon wafer.
REFERENCES:
patent: 4020830 (1977-05-01), Johnson et al.
patent: 4397714 (1983-08-01), Janata et al.
patent: 4505799 (1985-03-01), Baxter
patent: 4589970 (1986-05-01), Ligtenberg et al.
patent: 4657658 (1987-04-01), Sibbald
patent: 4851104 (1989-07-01), Connery et al.
patent: 4961833 (1990-10-01), Sakai et al.
patent: 5025298 (1991-06-01), Fey et al.
patent: 5311042 (1994-05-01), Anceau
Baxter Ronald D.
Connery James G.
Fogel John D.
Silverthorne Spencer V.
Chaudhuri Olik
Dutton Brian K.
Kaliko Joseph J.
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