Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2011-03-01
2011-03-01
Rosasco, Stephen (Department: 1721)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C716S030000
Reexamination Certificate
active
07897302
ABSTRACT:
A method is provided for forming an error diffusion-derived sub-resolutional grayscale reticle. The method forms at least one partial-light transmissive layer overlying a transparent substrate. At least one unit cell in formed in the transmissive layer. The unit cell is formed by selecting the number of reduced-transmission pixels in the unit cell, and forming a sub-pattern of reduced-transmission pixels in the unit cell. The unit cell is sub-resolutional at a first wavelength.
REFERENCES:
patent: 5821013 (1998-10-01), Miller et al.
patent: 2006/0200790 (2006-09-01), Shang et al.
patent: 2006/0210891 (2006-09-01), Progler et al.
patent: 2010/0040958 (2010-02-01), Ulrich et al.
Victor Ostromoukhov, “A Simple and Efficient Error-Diffusion Algorithm”, SIGGRAPH 2001.
Gao Wei
Ono Yoshi
Ulrich Bruce D.
Fraser Stewart A
Law Office of Gerald Maliszewski
Maliszewski Gerald
Rosasco Stephen
Sharp Laboratories of America Inc.
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