Erosion resistance of EUV source electrodes

Details Erosion resistance of EUV source electrodes Erosion resistance of EUV source electrodes

2003-08-07

2008-11-04

Wells, Nikita (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S493100, C378S119000

Reexamination Certificate

active

07446329

ABSTRACT:
Erosion of material in an electrode in a plasma-produced extreme ultraviolet (EUV) light source may be reduced by treating the surface of the electrode. Grooves may be provided in the electrode surface to increase re-deposition of electrode material in the grooves. The electrode surface may be coated with a porous material to reduce erosion due to brittle destruction. The electrode surface may be coated with a pseudo-alloy to reduce erosion from surface waves caused by the plasma in molten material on the surface of the electrode.

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