Erosion/corrosion resistant diaphragm

Electricity: conductors and insulators – With fluids or vacuum – With cooling or fluid feeding – circulating or distributing

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Details

257714, 361689, 428408, 428698, 428699, H05K 720

Patent

active

052411311

ABSTRACT:
The present invention relates generally to a new erosion/corrosion resistant diaphragm, and more particularly to an erosion/corrosion resistant diaphragm that can be used in an apparatus for cooling integrated circuit chips. An erosion/corrosion resistant coating can be provided on one side of a metallic foil that will be exposed to fluid impingement. And, a similar erosion/corrosion resistant coating can be provided on the opposite side of the metallic foil where the normal thermal cycling of the chip might damage the unprotected metallic foil.

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patent: 5097385 (1992-03-01), Chao-Fan Chu et al.
patent: 5166863 (1992-11-01), Shmunis
IBM Technical Disclosure Bulletin, vol. 20, No. 8, p. 3121 Jan. 1978, A. H. Johnson, "Diaphragm Cooling for Devices".
IBM Technical Disclosure Bulletin, vol. 20, No. 10, p. 3919 Mar. 1978, A. H. Johnson, "Device Cooling".
IBM Technical Disclosure Bulletin, vol. 28, No. 1B, pp. 494-495 Jun. 1984, C. D. Ostergren, "Mini Conformal Cold Plate".
IBM Technical Disclosure Bulletin, vol. 28, No. 11, pp. 4759-4761 Apr. 1986, "New TCM Design Using Bellows".
IBM Technical Disclosure Bulletin, vol. 29, No. 7, p. 2887 "Liquid-Cooled Circuit Package With Jet Impinging on Heat Sink Held Against Semiconductor Chip That is Sealed From The Jet".
IBM Journal of Research & Development, vol. 34, No. 6, pp. 849-857 Nov. 1990, "Diamondlike Carbon Films by RF Plasma-Assisted Chemical Vapor Deposition From Acetylene".
International Conference on Metallurgical Coatings and Thin Films, San Diego, Apr. 22, 1991, "Diamond-like carbon as an electrical insulator of copper device for chip cooling".

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