Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-06-07
2005-06-07
Dang, Hung Xuan (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S871000, C359S872000
Reexamination Certificate
active
06903861
ABSTRACT:
A microelectromechanical (MEM) optical switching apparatus is disclosed that is based on an erectable mirror which is formed on a rotatable stage using surface micromachining. An electrostatic actuator is also formed on the substrate to rotate the stage and mirror with a high angular precision. The mirror can be erected manually after fabrication of the device and used to redirect an incident light beam at an arbitrary angel and to maintain this state in the absence of any applied electrical power. A 1×N optical switch can be formed using a single rotatable mirror. In some embodiments of the present invention, a plurality of rotatable mirrors can be configured so that the stages and mirrors rotate in unison when driven by a single micromotor thereby forming a 2×2 optical switch which can be used to switch a pair of incident light beams, or as a building block to form a higher-order optical switch.
REFERENCES:
patent: 5804084 (1998-09-01), Nasby et al.
patent: 5867302 (1999-02-01), Fleming
patent: 5959376 (1999-09-01), Allen
patent: 6283601 (2001-09-01), Hagelin et al.
patent: 6299462 (2001-10-01), Biegelsen
patent: 6366414 (2002-04-01), Aksyuk et al.
patent: 6386716 (2002-05-01), Hagelin et al.
patent: 6491404 (2002-12-01), Hill
patent: 6526198 (2003-02-01), Wu et al.
patent: 6535318 (2003-03-01), Wood et al.
patent: 6543087 (2003-04-01), Yeh et al.
patent: 6545385 (2003-04-01), Miller et al.
patent: 2002/0135850 (2002-09-01), Hagelin et al.
K.S.J. Pister , et al “Microfabricated hinges,” Sensors and Actuators A, 33 (1992) pp. 249-256.
Richard Yeh, et al “Surface-Micromachined Components for Articulated Microrobots,” Journal of Microelectromechanical Systems, vol. 5, No. 1, Mar. 1996 pp. 10-17.
L.Y. Lin, et al, “Free-Space Micromachined Optical Switches for Optical Networking,” IEEE Journal of Selected Topics in Quantum Electronics, vol. 5, No. 1, Jan./Feb. 1999 pp. 4-9.
Paul M. Hagelin, et al “Optical Raster-Scanning Displays Based on Surface-Micromachined Polysilicon Mirrors,” IEEE Journal of Selected Topics in Quantum Electronics, vol. 5 No. 1, Jan./Feb. 1999 pp. 67-74.
Yong Seop Yoon, et al, “A Low voltage Actuated Micromirror with an Extra Vertical Electrode for 90 degree Rotation”, Journal of Micromechanics and Microengineering, Aug. 14, 2003 pp. 922-926.
Dang Hung Xuan
Hohimer John P.
Sandia Corporation
Tra Tuyen
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