Equipment management method

Details Equipment management method Equipment management method

2006-02-21

2006-02-21

Rodriguez, Paul (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S096000, C710S011000

Reexamination Certificate

active

07003367

ABSTRACT:
An equipment management method for managing semiconductor equipment via an equipment manager. In the equipment management method, production scenario rules and equipment behavior rules are first defined respectively in a production scenario database of a configuration controller and an equipment behavior database of an equipment driver. Them, a command is received from a manufacturing execution system (MES), and is converted into a production process scenario by looking up the corresponding production scenario rule in the production scenario database. Thereafter, the production process scenario is converted into a GEI (generic equipment interface) message with a GEI message specification, and the GEI message is transmitted to the equipment driver. Then, the GEI message is converted into equipment communication messages regulated by an equipment communication protocol by looking up the corresponding equipment behavior rule in the equipment behavior database. Then, the equipment communication messages are transmitted to equipment.

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