Equipment front end module

Details Equipment front end module Equipment front end module

2005-06-27

2009-10-20

Fox, Charles A (Department: 3652)

Material or article handling

Device for emptying portable receptacle

With container opening means

Reexamination Certificate

active

07604449

ABSTRACT:
Equipment front end module (EFEM) systems and methods for handling workpieces at EFEMs are disclosed. An equipment front end module (EFEM) system has an enclosure and a robot within the enclosure. The enclosure has two or more load ports, each being adapted to receive a front opening unified pod (FOUP). The robot is configured to move work pieces between the FOUP(s) and one or more work piece processing tools proximate the enclosure. The load ports are positioned relative to said robot such that said robot can move the work pieces between the tool and a FOUP at each load port with a simple R-theta motion or pure linear motion with respect to two axes.

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