Equipment for surface treatment

Details Equipment for surface treatment Equipment for surface treatment

1989-10-26

1990-06-26

Bennet, Henry A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156643, 156645, 156662, 34 36, 34 58, 134 1, 134 31, H01L 21306

Patent

active

049369407

ABSTRACT:
An equipment for surface treatment according to the present invention comprises a chamber capable of exhausting gas, a revolving stage disposed in said chamber for placing a material to be treated thereon, a quartz plate serving as a gap controlling means spaced from the material to be treated such that a gap between said revolving stage and said material to be treated is provided not to exceed 0.5 mm for forming a space of treatment, the quartz plate being provided with a gas supplying means for supplying a reactive gas containing oxygen into the space of treatment, and a gas exciting means provided on the a side of said quartz plate opposite that on which the material to be treated is located for exciting the oxygen contained in said reactive gas into metastable oxygen atoms.

REFERENCES:
patent: 4637146 (1987-01-01), Motoki et al.

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