Equipment for optically measuring the height of step

Details Equipment for optically measuring the height of step Equipment for optically measuring the height of step

1987-02-24

1988-09-13

Rosenberger, R. A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356376, G01B 1100

Patent

active

047705329

ABSTRACT:
An equipment for optically measuring the height of step according to the present invention is characterized in that a linearly polarized laser beam from a laser source is guided onto the side of an object through an optical fiber transferring said beam in the state that the plane of polarization thereof is maintained, the beam emitted from the optical fiber is applied onto the spots in proximity to each other on the surface of the object through the intermediary of an optical system separating said beam into two component beams having planes of polarization perpendicular to each other, the beams reflected from the surface of the object are made to go back through the aforesaid optical system so that two optical paths overlap each other, and are passed in the reverse direction through the aforesaid optical fiber and guided onto the side of the laser source, the optical power of the component parallel to the plane of polarization of the incident beam and the component perpendicular thereto out of the reflected beams emitted from the optical fiber are detected by photo detectors respectively, and the height of step in the object is determined from the ratio between these optical powers.

REFERENCES:
patent: 4595271 (1986-06-01), Suda et al.

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