Equipment for heating and cooling substrates for coating photo r

Details Equipment for heating and cooling substrates for coating photo r Equipment for heating and cooling substrates for coating photo r

1988-05-24

1989-09-05

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118101, 1566591, 156668, B44C 122, B29C 3700, B05D 306, B05C 1102

Patent

active

048635472

ABSTRACT:
Equipment for cooling semi-conductor substrates and printed circuit boards after coating photo resist thereon including heating the substrate for treatment. A heating block furnished with a heating plate is provided in a holding frame device on which the substrate is placed and is so mounted that the heating block can be elevated and lowered vertically therein. The heating block further includes a cooling block having a cooling plate which can be reciprocated from one open side of the holding frame device to the interior thereof, the cooling plate being vertically elevated and lowered in the holding frame equipment when the cooling block is in the holding frame device.

REFERENCES:
patent: 4543147 (1985-09-01), Noto et al.
patent: 4717645 (1988-01-01), Kato et al.

Affiliated with

Also associated with

Rating

Equipment for heating and cooling substrates for coating photo r does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Equipment for heating and cooling substrates for coating photo r, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Equipment for heating and cooling substrates for coating photo r will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-241106