Ventilation – Clean room
Patent
1998-09-30
2000-06-27
Joyce, Harold
Ventilation
Clean room
454236, F24F 706
Patent
active
060800607
DESCRIPTION:
BRIEF SUMMARY
INTRODUCTION
The present invention relates to an arrangement for supplying air to a room, preferably a clean room, which is divided into zones with different climatic requirements, comprising a first air treatment unit, from which air is supplied to a pressure chamber, which is shared by a plurality of zones and from which air is supplied to the various zones.
The invention is particularly suited for use in clean rooms having zones, in which very high climatic requirements are placed in terms of temperature and air humidity.
PRIOR-ART TECHNIQUE
Clean rooms are used to an increasing extent in connection with e.g. the manufacture of electronic components and as surgical operating rooms. When producing, for instance, semiconductors, different climatic conditions as to cleanness, temperature and air humidity of the surroundings are often required in different steps of the production process. The clean room in which the production takes place may therefore be divided into zones with different climatic requirements. The zones can be separated from each other by means of walls or screens. The climate in each zone is controlled by keeping the pollution level, temperature and humidity of the air supplied to the respective zones within certain limit values.
U.S. Pat. No. 4,549,472 discloses an arrangement for ventilation of a clean room, which is divided into zones requiring different conditions as to cleanness, temperature and air humidity. The various zones are delimited from each other by means of partitions, which are arranged in the clean room. Above the room, a mixing chamber, which is shared by the zones, is arranged, and above this a common air supply chamber. A return chamber that is shared by the zones is arranged below the clean room. The return chamber communicates via a return conduit with the mixing chamber. The return chamber also communicates via an air treatment unit with the air supply chamber. In the mixing chamber, above each zone with special climatic requirements, a ventilation unit is arranged. The ventilation units comprise a fan chamber, a distribution chamber and a filter container with a so-called HEPA (high efficiency particulate air) filter. The fan chamber is provided with two damper-equipped inlets which can communicate with the mixing chamber and the air supply chamber, respectively.
The climate in the clean room is controlled as follows. Outdoor air and part of the recirculated air from the return chamber are supplied to the air treatment unit, where the air is given a predetermined temperature and humidity. In connection with the air treatment unit, also a primary filtration of the air takes place. The thus treated supply air is supplied to the air supply chamber. The other part of the recirculated air is conducted from the return chamber to the mixing chamber. By controlling the inlet dampers of the ventilation units, it is possible to control the mixing ratio of supply air to recirculating air in the air supplied to the respective zones. A zone requiring a high degree of cleanness but nothing in respect of temperature or air humidity is supplied with recirculated air only, which in fact is already filtered through a HEPA filter when first passing through the ventilation unit. A zone with requirements as to temperature and air humidity only is supplied with merely supply air from the air treatment unit. Zones requiring both a certain degree of cleanness and a certain temperature and air humidity are supplied with a mixture of supply air and recirculated air.
TECHNICAL PROBLEM
The above-described known plant entails a number of drawbacks when supplying air to a clean room which is divided into zones. To begin with, the plant is of complicated design with many components and units. For instance, each zone must be provided with a ventilation unit, which, in addition to the HEPA filter, comprises among other things a fan, two dampers, a fan chamber and a distribution chamber. Besides, each such ventilation unit must be provided with control equipment for controlling the fan and
REFERENCES:
patent: 2609743 (1952-09-01), Ashley et al.
patent: 3824909 (1974-07-01), Horneff et al.
patent: 4549472 (1985-10-01), Endo et al.
patent: 4699640 (1987-10-01), Suzuki et al.
patent: 4873914 (1989-10-01), Hirayama et al.
patent: 5058491 (1991-10-01), Wiemer et al.
patent: 5326316 (1994-07-01), Hashimoto et al.
patent: 5752985 (1998-05-01), Nagafume et al.
patent: 5828572 (1998-10-01), Hasegawa et al.
ABB Flakt Aktiebolag
Joyce Harold
LandOfFree
Equipment for air supply to a room does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Equipment for air supply to a room, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Equipment for air supply to a room will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1779846