Equipment and method for supply of organic metal compound

Details Equipment and method for supply of organic metal compound Equipment and method for supply of organic metal compound

1988-12-21

1991-05-28

Bennet, Henry A.

Coating processes

Coating by vapor, gas, or smoke

34 22, 118726, C23C 1600

Patent

active

050194232

ABSTRACT:
Supply equipment for providing a stable supply of feed gas of an organic metal compound at a constant concentration comprises a cylindrical vessel with an organic metal compound housed, an inlet tube of carrier gas for vaporizing said organic metal compound, an outlet tube for letting out the carrier gas substantially saturated with the vaporized organic metal compound, a room provided in the lower part of the vessel which is connected to said carrier gas inlet tube, a packed bed of an organic metal compound formed above said room, and a partition with a plurarity of pores partitioning said room and said packed bed.

REFERENCES:
patent: 2701901 (1955-02-01), Pawlyk
patent: 2738762 (1956-03-01), Pawlyk

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