Abrading – Abrading process – Combined abrading
Reexamination Certificate
2007-05-08
2007-05-08
Wilson, Lee D. (Department: 3723)
Abrading
Abrading process
Combined abrading
C451S036000, C451S059000, C451S533000, C451S550000
Reexamination Certificate
active
11519833
ABSTRACT:
Double-sided polishing equipment configured to polish a rectangular substrate, comprising a carrier having a pocket configured to accommodate a rectangular substrate, a lateral linear moving mechanism configured to move the carrier, first and second polishing pads with first and second rotational axes, respectively, offset from centers of the pads, the polishing surfaces of the first and second polishing pads being parallel. The equipment further includes at least one elevating mechanism coupled to at least one of the polishing pads, first and second rotary drive mechanisms coupled to each of the first and second polishing pads, respectively; and configured to rotate the first and second pads about the first and second rotational axes. A polishing-agent supplying device is present and configured to supply polishing agent to a plane where a substrate that is accommodated in the pocket to accommodate the substrate comes into contact with the polishing pads.
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Kobayashi Kazuo
Tsuji Katsuhiro
Ojini Anthony
Okamoto Machine Tool Works Ltd.
Wilson Lee D.
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