Equipment and method for detecting foreign matters

Details Equipment and method for detecting foreign matters Equipment and method for detecting foreign matters

2011-03-01

2011-03-01

Punnoose, Roy (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100

Reexamination Certificate

active

07898654

ABSTRACT:
A foreign matter detector and a foreign matter detecting method are provided, with which foreign matter detection performance can be improved. The foreign matter detector comprises: a means for irradiating first inspection light and second inspection light to an inspection area such that their incident planes are perpendicular to each other; a measuring means for measuring the spectrum of reflected light, the reflected light being a reflection of the inspection light at the inspection area; and a means for determining, by analyzing the spectrum of the reflected light, whether any foreign matter is intermingled or not.

REFERENCES:
patent: 5291028 (1994-03-01), Droge et al.
patent: 7719669 (2010-05-01), Matsui et al.
patent: 2002/0135757 (2002-09-01), Shires
patent: 2008/0013084 (2008-01-01), Matsui et al.
patent: 2008/0024778 (2008-01-01), Honda et al.
patent: 6-323999 (1994-11-01), None
patent: 9-287921 (1997-11-01), None
patent: 9-304294 (1997-11-01), None
patent: 09287921 (1997-11-01), None
patent: 2003-202297 (2003-07-01), None
patent: 2004-301690 (2004-10-01), None
patent: 2007-178407 (2007-07-01), None
patent: 2008-020359 (2008-01-01), None

Affiliated with

Also associated with

Rating

Equipment and method for detecting foreign matters does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Equipment and method for detecting foreign matters, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Equipment and method for detecting foreign matters will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2746763