Static information storage and retrieval – Floating gate – Particular biasing
Patent
1993-02-11
1994-09-06
Clawson, Jr., Joseph E.
Static information storage and retrieval
Floating gate
Particular biasing
365900, 257316, G11C 1140
Patent
active
053454170
ABSTRACT:
An integrated EPROM device which can be manufactured using standard high-definition photolithographic techniques with unit cells of markedly reduced dimensions as compared to the minimum dimensions that can be achieved with the prior art, has field isolation structures between adjacent cells along rows of the array in the form of continuous isolation strips which extend for the whole column length of the array, thus avoiding the problems associated with photolithographic defining rectangular geometries. The electrical interconnection between the sources of the cells of each row is achieved by a special metal source "line" formed between two adjacent gate lines, using for the purpose a conformally deposited metal layer from which both the drain contacts and these source interconnection metal "lines" are created in a self-alignment way.
REFERENCES:
patent: 4373248 (1983-02-01), McElroy
patent: 4377818 (1983-03-01), Kuo et al.
patent: 4698787 (1987-10-01), Mukherjee et al.
patent: 4783766 (1988-11-01), Samachisa et al.
patent: 5160986 (1992-11-01), Bellezza
Clawson Jr. Joseph E.
SGS--Thomson Microelectronics S.r.l.
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