EPROM and flash memory cells with source-side injection

Static information storage and retrieval – Floating gate – Particular biasing

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257314, G11C 1604

Patent

active

059826690

ABSTRACT:
An electrically-programmable read-only-memory (EPROM) and a flash memory cell provide both source-side and drain-side injection, along with a reduced cell size, by forming the memory cell in a trench. The drain is formed in the top surface of the substrate, the source is formed in the bottom surface of the trench, and the stacked gate is formed over the sidewall of the trench.

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