Epitaxial reactor

Details Epitaxial reactor Epitaxial reactor

1980-10-21

1983-12-06

Bernstein, Hiram H.

Chemical apparatus and process disinfecting, deodorizing, preser

Physical type apparatus

Crystallizer

156613, 118725, C30B 2510

Patent

active

044193327

ABSTRACT:
An epitaxial reactor comprises an enclosed evacuable container, a heating tube in the container in the wall of which there is a heat source and a temperature control system which is sealed at one end, a feed line for reaction gas, which line passes along the heating tube so as to provide an outlet for reaction gas adjacent the seal, and means for accommodating the elements to be treated on the inside of the heating tube.

REFERENCES:
patent: 3098763 (1963-07-01), Deal et al.
patent: 3220380 (1965-11-01), Schaarschmidt
patent: 3391270 (1968-07-01), Harris et al.
patent: 3603284 (1971-09-01), Garnache
patent: 3659552 (1972-05-01), Briody
patent: 3704987 (1972-12-01), Arndt et al.
patent: 3862397 (1975-01-01), Anderson et al.
patent: 3885061 (1975-05-01), Corboy et al.
patent: 3915119 (1975-10-01), Roy et al.
patent: 4099041 (1978-07-01), Berkman et al.
Bratter et al., IBM Technical Bulletin, vol. 16, No. 1, Jun. 1973, p. 4.

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