Epitaxial layer structures and precursors for topotactic...

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Reexamination Certificate

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C428S697000, C428S398000, C428S699000, C428S701000, C428S704000

Reexamination Certificate

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07732067

ABSTRACT:
This invention disclosure describes methods for the fabrication of metal oxide films on surfaces by topotactic anion exchange, and laminate structures enabled by the method. A precursor metal-nonmetal film is deposited on the surface, and is subsequently oxidized via topotactic anion exchange to yield a topotactic metal-oxide product film. The structures include a metal-oxide layer(s) and/or a metal-nonmetal layer(s).

REFERENCES:
patent: 3980763 (1976-09-01), Mullhaupt
patent: 5262347 (1993-11-01), Sands
patent: 5589284 (1996-12-01), Summerfelt et al.
patent: 5801105 (1998-09-01), Yano et al.
patent: 6013553 (2000-01-01), Wallace et al.
patent: 6045626 (2000-04-01), Yano et al.
patent: 6258459 (2001-07-01), Noguchi et al.
patent: 6291866 (2001-09-01), Wallace et al.
patent: 6436801 (2002-08-01), Wilk et al.
patent: 6573209 (2003-06-01), Sambasivan et al.
patent: 6642539 (2003-11-01), Ramesh et al.
patent: 6645639 (2003-11-01), Sambasivan et al.
patent: 6784139 (2004-08-01), Sankar et al.
patent: 2004/0011280 (2004-01-01), Higuchi et al.
patent: WO 9303880 (1993-04-01), None
Definition of Topotaxy, Robert D. Shannon and Ronald C. Rossi, Nature Search Journal, Nature Publishing Group, Jun. 6, 1964.
Epitaxial Growth and Magnetic Properties of EuO on (001) Si by Molecular-Beam Epitaxy, Applied Physics Letters, vol. 83, No. 5, Aug. 4, 2003.
Written Opinion of the International Searching Authority in PCT/US2005 / 040923 dated May 11, 2006.
Krusin-Elbaum, et al., “Oxidation Kinetics of ZrN Thin Films,” 1983, pp. 111-117, Electronics and Optics, Elsevier Sequoia, The Netherlands.
Sleight, et al., “Crystal Chemistry of the Rare Earth Sesquisulfides,” Nov. 1968, pp. 2282-2288, Inorganic Chemistry, vol. 7, No. 11.
Linares, “Growth and Properties of CeO2and ThO2Single Cyrstals,” 1967, pp. 1285-1291, J. Phys. Chem. Solids, vol. 28, Pergamon Press, Great Britain.
Walker, et al., “Thin-Film Perovskites—Ferroelectric Materials for Integrated Optics,” 1996, pp. 221-227, NanoStructured Materials, vol. 7, Nos. 1/2, Elsevier Science Ltd., USA.
Fievet, et al., “Preparation and Study by Electron Microscopy of the Development of Texture with Temperature of a Porous Exhydroxide Nickel Oxide,” 1975, pp. 350-356, Academic Press, Inc.
Caillet, et al., “Étude de la Corrosion de Revêtements Réfractaires sur le Zirconium, I. Oxydation par L'Oxygène de Revêtements de Nitrure de Zirconium,” 1977, pp. 305-322, Journal of the Less-Common Metals, 51, Elsevier Sequoia S.A., Lausanne, The Netherlands, summary only.
Caillet, et al., “Étude de la Corrosion de Revêtements Réfractaires sur le Zirconium, II. Oxydation par L'Oxygéne de Revêtements de Carbonitrure de Zirconium,” 1977, pp. 323-331, Journal of the Less-Common Metals, 51, Elsevier Sequoia S.A., Lausanne, The Netherlands, summary only.
Caillet, et al., “Étude de la Corrosion de Revêtements Réfractaires sur le Zirconium, III. Oxydation par la Vapeur D'eau de Revêtements de Nitrure et de Carbonitrure de Zirconium,” 1978, pp. 37-46, Journal of the Less-Common Metals, 58, Elsevier Sequoia S.A., Lausanne, The Netherlands, summary only.
Borchardt, “On the Oxidation of Yttrium,”1964, pp. 711-719, J. Inorg. Nucl. Chem., vol. 26, Pergamon Press Ltd., Northern Ireland.
Klemm, et al., “Lanthanoxyfluorid,” 1941, pp. 167-171, Zeitschrift für anorganische und allgemeine Chemie, Band 248.
Bevan, et al., “The crystal structures of some Vernier phases in the yttrium oxide-fluoride system,” 1990, pp. 451-465, Eur. J. Solid State Inorg. Chem., t. 27, Gauthier-Villars.
Kohlschütter, “Uber den graphitischen Kohlenstoff,” 1918, pp. 35-68, Anorganisches Laboratorium der Universität.
Hartmanova, et al., “Characterization of yttria-stabilized zirconia thin films deposited by electron beam evaporation on silicon substrates,” 1998, pp. 969-975, Journal of Materials Science 33, Chapman & Hall.
Andersson, “Aspects on the problems of synthesis and structure of some oxide or oxide-like compounds formed by the transition elements in the groups 4, 5 and 6 of the period table,” 1967, pp. 521-538, Arkiv för Kemi Band 26 nr 44, Almqvist & Wiksells Boktryckeri AB.
Figlarz, et al., “Topotaxy, Nucleation and Growth,” 1990, pp. 143-170, Solid State Ionics 43, Elsevier Science Publishers B.V, North-Holland.
Wakatsuki, et al., “Topotaxial and Some Other Characters of the Transformation from Hexagonal to Wurtzitic BN,”1986, pp. 256-258, Physica 139 & 140B, Elsevier Science Publishers B.V., Amsterdam.
McCarthy, et al., “Crystal Chemistry and Compound Formation in the Systems Rare Earth Sesquioxide-WO3,” Jul. 1972, pp. 397-411, National Bureau of Standards Special Publication 364.
Ban, et al., “Defects and Mass Transport in Reduced CeO2Single Crystals,” Jul. 1972, pp. 353-365, National Bureau of Standards Special Publication 364.
Lowenstein, et al., “Growth and X-ray Studies of Single Crystals of Higher Oxides of Praseodymium and Terbium,” Jul. 1972, pp. 343-351, National Bureau of Standards Special Publication 364.
Hultman, et al., “Mg—Ti—spinel formation at the TiN/MgO interface by solid state reaction: Confirmation by high-resolution electron microscopy,” Aug. 1991, pp. 1744-1749, J. Mater. Res., vol. 6, No. 8, Materials Research Society.
Kennedy, On crystallography of topotaxy and transformation in the system MnO-Mn3O4and the ferrite (Mn, Co1)3O4,, 1974, pp. 1557-1559, Journal of Materials Science 9, Chapman and Hall Ltd.
Schmid, et al., “Synthesis and Structure of a Compositely Modulated Solid Solution in the Zirconium Nitride Oxide Fluoride System,” 1994, pp. 391-400, Journal of Solid State Chemistry 109, Academic Press, Inc.
Carter, et al., “Thin-Film Reactions,” 1986, pp. 676-680, Ber. Bunsenges. Phys. Chem. 90, VCH Verlagsgesellschaft mbH.
Subba Rao, et al., “Electrical Transport in Rare-Earth Oxides,” 1970, pp. 377-384, Journal of Solid State Chemistry 2.
Gerand, et al., “A New Tungsten Trioxide Hydrate, WO3⅓H2O: Preparation, Characterization, and Crystallographic Study,” 1981, pp. 312-320, Journal of Solid State Chemistry 38, Academic Press, Inc.
Boulesteix, et al., “Domain Formation and Interfaces in Praseodymium and Terbium Oxides Obtained by Reduction of PrO2and TbO2: A Comparison with Group Theory Predictions,” 1987, pp. 125-135, Journal of Solid State Chemistry 66, Academic Press, Inc.
Voitovich, et al., “High-Temperature Oxidation of the Nitrides of the Group IV Transition Metals, II. Oxidation of Zirconium and Hafnium Nitrides,” 1976, pp. 747-750, Institute of Materials Science, Academy of Sciences of the Ukrainian SSR, Plenum Publishing Corporation, New York.
Graff, et al., “Structure of the Topotaxial Mg2SnO4/MgO Solid Reaction Front,” 1998, pp. 117-128, Zeitschrift für Physikalische Chemie, Bd. 206, R. Oldenbourg Verlag, München.
Hayward, et al., “Sodium Hydride as a Powerful Reducing Agent for Topotactic Oxide Deintercalation: Synthesis and Characterization of the Nickel(I) Oxide LaNiO2,” 1999, pp. 8843-8854, J. Am. Chem. Soc., vol. 121, No. 38, American Chemical Society.
Revcolevschi, et al., “Crystallographically aligned metal-oxide composite made by reduction of a directionally solidified oxide-oxide eutectic,” Jul. 1985, pp. 335-336, Nature vol. 316.
Seeger, et al., “Synthesis and Structure of Ba[Zrn2] and Ba2[NbN3],” 1994, pp. 2008-2013, Z. anorg. allg. Chem. 620.
Lu, et al., “Porous Single-Crystalline TaON and Ta3N5Particles,” May 4, 2004, pp. 1603-1605, Chemistry of Materials, vol. 16, No. 9, American Chemical Society.
Zachariasen, “Crystal Chemical Studies of the 5f-Series of Elements. XIV. Oxyfluo

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