Epitaxial integrated E-dE solid state detector telescope

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357 15, 357 30, 357 89, H01L 2714

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043408990

ABSTRACT:
An epitaxial integrated E-dE solid state detector telescope comprising a dE detector produced on an epitaxial layer and a E detector produced on a high purity silicon layer, both of which are fabricated on a single silicon wafer having N-N.sup.+ -N type complex structure. Said dE and E detectors are electrically isolated by a very low resistive N.sup.+ type silicon layer, which is produced on the high purity N type silicon substrate by impurity diffusion technique and is buried under the epitaxial silicon layer. Electrodes of dE and E detectors are produced on both sides of the silicon wafer by means of evaporation of gold in a vacuum. Said electrodes are reverse biased and depletion layers which act as active regions of dE and E detectors are extended from outsides toward said buried layer, providing independent charge collections of carries produced by incident charged particles in dE and E detectors by said electrodes.

REFERENCES:
patent: 4160985 (1979-07-01), Kamins

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