Epitaxial crystalline aluminium nitride

Details Epitaxial crystalline aluminium nitride Epitaxial crystalline aluminium nitride

1978-07-17

1980-02-19

Ansher, Harold

Stock material or miscellaneous articles

Surface property or characteristic of web, sheet or block

252 629, 310313, 310357, 310358, 428539, C04B 3558, C04B 3510, H01L 4110

Patent

active

041895169

ABSTRACT:
Material suitable for a surface acoustic wave device comprises an epitaxial film of aluminum nitride on the surface of a substrate of single crystal aluminum oxide, said surface having the crystallographic orientation 1100.

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patent: 3665225 (1972-05-01), Heuvel et al.
patent: 3676721 (1972-07-01), Heuvel et al.
patent: 3950596 (1976-04-01), Carr et al.
patent: 4126731 (1978-11-01), Nishizawa et al.
patent: 4133925 (1979-01-01), Shaw et al.

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