Environmentally stable lithium niobate acoustic wave devices

Details Environmentally stable lithium niobate acoustic wave devices Environmentally stable lithium niobate acoustic wave devices

1983-12-19

1984-11-20

Miller, J. D.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

333155, H03H 925

Patent

active

044840985

ABSTRACT:
Acoustic Wave Devices comprise lithium niobate substrates 6, 22 having the principal plane cut at zero degrees and 128.degree., respectively, with respect to the Y crystallographic axis thereof, propagating in the X direction, with amorphous silicon dioxide surface layers of 0.42 and 1.24 wavelengths, respectively.

REFERENCES:
patent: 3680009 (1972-07-01), Slobodnik, Jr.
patent: 3965444 (1976-06-01), Willingham et al.
patent: 4342012 (1982-07-01), Inaba et al.
Yamanouchi et al., "Piezoelectric Acoustic Boundary Waves Propagating Along the Interface of SiO.sub.2 and LiTaO.sub.3 ", IEEE T-SU, vol. SU-25, No. 6, Nov. 78, pp. 384-389.
Shibayama et al., "Saw and Boundary Wave Properties for SiO.sub.2 /LiTaO.sub.3 Structure Fabricated by Plasma-CVD", Proc. 1980, IEEE Ultrasonics Symposium, pp. 455-459.

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