Environmentally safe dispensing assembly for ultra-pure liquid c

Details Environmentally safe dispensing assembly for ultra-pure liquid c Environmentally safe dispensing assembly for ultra-pure liquid c

1994-10-19

1995-10-31

Kashnikow, Andres

Dispensing

With cleaning means

141 91, 141 92, B65B 304

Patent

active

054622077

ABSTRACT:
A reusable, high purity liquid chemical dispensing assembly is provided for use in a production line that processes chemically treated articles such as semiconductors. This dispensing assembly contains a high purity liquid chemical, such as photoresist, which it dispenses into a production line application station. The dispensing assembly can be disconnected from the production line when it is essentially emptied of the liquid chemical, and can be then rinsed and purged of chemical residue, and refilled with fresh chemical. The rinsing, purging, and refilling operations are performed in an environmentally safe manner. By providing a reusable dispensing assembly the problem of disposing of chemically polluted containers is eliminated.

REFERENCES:
patent: 3359062 (1967-12-01), Palm
patent: 4273263 (1981-06-01), Voegele et al.
patent: 4318431 (1982-03-01), Evans
patent: 4499932 (1985-02-01), Perigo et al.
patent: 5086949 (1992-02-01), Vulpitta et al.

Affiliated with

Also associated with

Rating

Environmentally safe dispensing assembly for ultra-pure liquid c does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Environmentally safe dispensing assembly for ultra-pure liquid c, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Environmentally safe dispensing assembly for ultra-pure liquid c will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1767463