Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property or radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2008-07-01
2008-07-01
Lee, Sin J. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property or radiation sensitive...
Radiation sensitive composition or product or process of making
C430S921000, C430S270100, C430S325000, C430S326000, C430S330000, C522S031000
Reexamination Certificate
active
07393627
ABSTRACT:
Novel classes of ionic photoacid generator (PAGs) compounds having relatively environmentally friendly anions with no perfluorooctyl sulfonate (no-PFOS) are provided and photoresist composition that comprise such compounds. The new PAGs produce a photoacid having a short or no perfluoro alkyl chain (ie., no-PFOS) attached to a variety of functional groups. The PAGs of the invention are useful as photoactive component in the chemically amplified resist compositions used for microfabrication.
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Ayothi Ramakrishnan
Kim Kyung-min
Liu Xiang-Qian
Ober Christopher K.
Cornell Research Foundation Inc.
Lee Sin J.
Schwegman Lundberg & Woessner, P.A.
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