Environmental system including a transport region for an...

Details Environmental system including a transport region for an... Environmental system including a transport region for an...

2007-02-12

2008-03-18

Fuller, Rodney (Department: 2862)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S077000

Reexamination Certificate

active

07345742

ABSTRACT:
A lithographic projection apparatus that is arranged to project a pattern from a patterning device onto a substrate using a projection system has a liquid supply system arranged to supply a liquid to a space between the projection system and the substrate. The apparatus also includes a liquid removal system having a conduit having an open end adjacent a volume in which liquid will be present, a porous member between the end of the conduit and the volume, and a suction device arranged to create a pressure differential across the porous member.

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