Environmental parameter measurement device and method for laser

Details Environmental parameter measurement device and method for laser Environmental parameter measurement device and method for laser

1997-12-22

1999-07-06

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356361, G01B 902

Patent

active

059203927

ABSTRACT:
An environmental metrology device (10) containing sensor (12) elements which include a pressure sensor (20), a temperature sensor (22), and a humidity sensor (24) all located in close proximity within a housing (18). Control circuitry (16) is further provided to direct operation of the sensors (12) and to communicate with an interferometer controller (42) via a signal port (14) and a cable (92). Additional instances of the device (10) may be connected in a daisy-chain network configuration via additional signal ports (14) and cables (90). One or more instances of the device (10) permit highly localized characterization of atmospheric index of refraction in the measurement region (60) of a laser interferometer (30). The interferometer controller (42) is thereby able to compensate measurements performed by the laser interferometer (30) before they are passed onto manufacturing process controls (48).

REFERENCES:
patent: 4643577 (1987-02-01), Roth et al.
N. Bobroff, "Recent advances in displacement measuring interferometry," Meas. Sci. Technol. 4 (1993), pp. 907-926.
W.T. Estler, "High-accuracy displacement interferometry in air," Applied Optics vol. 24, No. 6 (Mar. 15, 1985), pp. 808-815.
P. Schellekens et al., "Design and Results of a New Interference Refractometer Based on . . . Laserinterferometer," Annals of the CIRP vol. 35 (1986), pp. 387-391.

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