Environmental damage reduction

Details Environmental damage reduction Environmental damage reduction

2006-08-29

2006-08-29

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Inspecting

C438S014000

Reexamination Certificate

active

07096752

ABSTRACT:
A substrate processor that processes and inspects a substrate. A substrate handler moves a substrate within the substrate processor. A processing chamber receives the substrate from the substrate handler, and processes the substrate using damaging material that is retained to some extent by the substrate. An inspection tool receives the substrate from the substrate handler after the substrate has been processed. A controlled environment surrounds at least a portion of the inspection tool and the substrate. A purge gas supply provides a purge gas at a flow rate. A moisture control unit adjusts the purge gas to a relative humidity, and gas inlets direct the purge gas into the controlled environment.

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