Environmental control system

Details Environmental control system Environmental control system

1993-03-19

1995-03-28

Joyce, Harold

Ventilation

Clean room

454 57, F24F 316, F24F 7007

Patent

active

054012120

ABSTRACT:
An environmental control systems including a modular isolation chamber is disclosed. Together with associated atmospheric regulatory equipment, the connectable modular chambers provide a smaller, cost-effective alternative to the traditional clean rooms utilized for fabricating or processing semiconductors and other products. Because the work pieces and processing or other machinery are isolated from the remainder of the rooms in which they are located, decontamination of much of each room is not required. Use of the portable, modular chambers of the present invention also permits increased control over particulate contaminates smaller than heretofore satisfactorily regulated and individualized regulation of differing processing environments within a single room.

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