Coating processes – Centrifugal force utilized
Reexamination Certificate
2005-01-18
2005-01-18
Jolley, Kirsten C. (Department: 1762)
Coating processes
Centrifugal force utilized
C427S377000, C427S421100, C427S425000, C118S052000, C118S320000, C438S758000
Reexamination Certificate
active
06844027
ABSTRACT:
Systems and methods are described for environmental exchange control for a polymer on a wafer surface. An apparatus for controlling an exchange between an environment and a polymer on a surface of a wafer located in the environment includes: a chamber adapted to hold the wafer, define the environment, and maintain the polymer in an adjacent relationship with the environment; and a heater coupled to the chamber. A method for improving performance of a spin-on material includes: forming the spin-on material on a surface of a wafer; then locating the spin-on material in an environment so that said environment is adjacent said spin-on material; and then controlling an exchange between the spin-on material and said environment. The systems and methods provide advantages because inappropriate deprotection is mitigated by careful control of the environmental temperature and environmental species partial pressures (e.g. relative humidity).
REFERENCES:
patent: 5358740 (1994-10-01), Bornside et al.
patent: 5658387 (1997-08-01), Reardon et al.
patent: 5667942 (1997-09-01), Nakao et al.
patent: 5670210 (1997-09-01), Mandal et al.
patent: 5766671 (1998-06-01), Matsui
patent: 5792590 (1998-08-01), Hirasawa
patent: 5814432 (1998-09-01), Kobayashi
patent: 5824604 (1998-10-01), Bar-Gadda
patent: 5885755 (1999-03-01), Nakagawa et al.
patent: 5954878 (1999-09-01), Mandal et al.
patent: 5968691 (1999-10-01), Yoshioka et al.
patent: 6002108 (1999-12-01), Yoshioka
patent: 6027760 (2000-02-01), Gurer et al.
patent: 6040120 (2000-03-01), Matsushita et al.
patent: 6042994 (2000-03-01), Yang et al.
patent: 6254936 (2001-07-01), Gurer et al.
patent: 6468586 (2002-10-01), Gurer et al.
patent: 0 747 767 (1996-11-01), None
patent: 0 854 390 (1998-07-01), None
patent: 08-138993 (1996-05-01), None
Patent Abstracts of Japan, vol. 1998, No. 13, Nov. 30, 1998 (JP 10-214775, Aug. 11, 1988, Hideyuki).
Patent Abstracts of Japan, vol. 013, No. 138, Apr. 6, 1989, (JP 63-304250, Dec. 12, 1988, Mitsuro).
Patent Abstracts of Japan, vol. 014, No. 148, Mar. 20, 1990, (JP 02-008853, Jan. 12, 1990, Kazushi).
Patent Abstracts of Japan, vol. 1995, No. 09, Oct. 31, 1995, (JP 07-161619, Jun. 23, 1995, Keizo).
Patent Abstracts of Japan, vol. 008, No. 183, Aug. 23, 1984, (JP 59-074552, Apr. 27, 1984, Toshio).
Patent Abstracts of Japan, vol. 1998, No. 12, Oct. 31, 1998, (JP 10-198048, Jul. 31, 1998, Isao).
Golden Kevin
Gurer Emir
Lee Ed C.
Lewellen John W.
Reynolds Reese
ASML Holding N.V.
Blakely & Sokoloff, Taylor & Zafman
Jolley Kirsten C.
LandOfFree
Environment exchange control for material on a wafer surface does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Environment exchange control for material on a wafer surface, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Environment exchange control for material on a wafer surface will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3420405