Enveloping device and vertical heat-treating apparatus for semic

Details Enveloping device and vertical heat-treating apparatus for semic Enveloping device and vertical heat-treating apparatus for semic

1999-08-17

2000-11-07

Wilson, Pamela

Heating

Work feeding, agitating, discharging or conveying...

Removable furnace bottom section or kiln cart

432242, 432152, 277614, 277637, 277914, 118733, F27D 312

Patent

active

06142773&

ABSTRACT:
The process tube of a vertical heat-treating apparatus for semiconductor wafers has a port at the bottom to be opened and closed by a lid. A sealing mechanism is arranged to seal the connecting portion between the flange of the port and the flange of the lid. The flanges are provided with annular mirror surfaces on the inner side, which face and contact each other to form an inner seal. The flanges are also provided with annular counter surfaces on the outer side, which face each other with a gap therebetween. A metal sheet member is arranged in the gap such that an outer seal is formed by the metal sheet member and the counter surfaces. The metal sheet member has sheets vacuum-stuck onto the counter surfaces, respectively. A buffer space is formed between the inner and outer seals, and is vacuum-exhausted by an exhaust unit.

REFERENCES:
patent: 5533736 (1996-07-01), Yamaga

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