Enhancing the image contrast of a high resolution exposure tool

Details Enhancing the image contrast of a high resolution exposure tool Enhancing the image contrast of a high resolution exposure tool

2006-11-22

2011-11-08

Glick, Edward J (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S055000

Reexamination Certificate

active

08054449

ABSTRACT:
A system and method are utilized to equalize intensity or energy in various diffraction order portions of a patterned beam. The patterned beam is formed using a diffractive patterning device. An attenuator is placed at a pupil of a projection system to attenuate respective diffraction order portions of the patterned beam. The projection device is also used to project the patterned beam onto a target portion of a substrate, after the respective attenuations.

REFERENCES:
patent: 5208629 (1993-05-01), Matsuo et al.
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5440426 (1995-08-01), Sandstrom
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5621498 (1997-04-01), Inoue et al.
patent: 5627626 (1997-05-01), Inoue et al.
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5707501 (1998-01-01), Inoue et al.
patent: 5757470 (1998-05-01), Dewa et al.
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6687041 (2004-02-01), Sandstrom
patent: 6747783 (2004-06-01), Sandstrom
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 2002/0008863 (2002-01-01), Taniguchi et al.
patent: 2003/0035089 (2003-02-01), Chandhok et al.
patent: 2003/0215616 (2003-11-01), Pierrat
patent: 2004/0041104 (2004-03-01), Liebregts et al.
patent: 2004/0130561 (2004-07-01), Jain
patent: 2005/0007572 (2005-01-01), George et al.
patent: 2006/0033900 (2006-02-01), Saitoh et al.
patent: 0 507 487 (1992-10-01), None
patent: 0 562 133 (1998-02-01), None
patent: 5-041345 (1993-02-01), None
patent: 5-326370 (1993-12-01), None
patent: 6-043393 (1994-02-01), None
patent: 6-181159 (1994-06-01), None
patent: 7-301908 (1995-11-01), None
patent: 8-083761 (1996-03-01), None
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
patent: WO 98/38597 (1998-09-01), None
Notice of Reasons for Rejection mailed Aug. 3, 2010 for Japanese Patent Application No. 2007-296176, 4 pgs.

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