Enhancement of hydrogenation of materials encapsulated by an oxi

Details Enhancement of hydrogenation of materials encapsulated by an oxi Enhancement of hydrogenation of materials encapsulated by an oxi

1996-09-30

1998-04-28

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Ion plating or implantation

427404, 4274193, 427529, 427530, 427531, 427535, 427537, 427574, 427576, 427578, 427579, 437937, C23C 1414

Patent

active

057442029

ABSTRACT:
A method for enhancing hydrogenation of oxide-encapsulated materials includes forming an injection layer having a low reflectivity of monatomic hydrogen on an oxide-encapsulated material, and hydrogenating the material with an atomic hydrogen source such as a hydrogen plasma. The method results in a significant decrease in hydrogenation time required to passivate the oxide-encapsulated materials.

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